 |
|
 |
|
Comprehensive Surface Metrology Solutions |
| |
The P-6 and P-16+ (3D bench-top surface profiling), Alpha-Step D-100 /120 / IQ (2D bench top surface profiling), MicroMAX-100/120 Optical profiling provide comprehensive surface metrology analysis and surface topography control solutions to meet the needs of the most demanding profiling applications. PVI-6 inline/off-line PV Inspection Tools provide the capability to inspect solar wafers and cells at the highest speed and accuracy for all stages of the production process.
|
| |
| |
ICOS PVI-6: Automated Optical In-line Solar Wafer and Cell Inspection
|
 |
| |
|
 |
Higher accuracy and repeatability measurements, with up to a 4x measurement accuracy improvement, delivers higher yield and improved end-of-line cell classification. |
|
Easier calibration and set-up, with calibration time decreased by approximately 80 percent, enables faster product ramp during initial installation. |
|
Tool matching and central module management, offers consistent and easily attainable results in large production environments, across multiple production lines. |
| |
For more information click here PVI-6 |
| |
|
|
| |
|
| |
 |
Alpha-Step IQ
The Alpha-Step IQ is a state-of-the-art, stylus-based surface profiler that combines high measurement precision with versatility and economy. Ideal for applications such as semiconductor pilot lines and materials research, this advanced profiler enables faster process learning and higher yields. With guaranteed 8Ã… (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ provides excellent repeatability and performance to analyze and monitor processes.
For more details click here ASIQ
|
| |
|
| |
| The KLA-Tencor Development Series of Stylus profilers offer a complete Profilometer measurement solution focusing on the needs of the engineering and research community. Our Development Series of surface profiler products is designed to match the varied requirements of our customers through the delivery of full featured Profilometer products, integration of new technologies, and improved performance. |
| |
|
| |
| |
Alpha-Step D-100
|
 |
|
30 mm scan length |
|
Z sensor range up to 1.2 mm |
|
140mm motorized sample positioning stage (150mm x178 mm motion) |
|
Force control 0.03mg – 10mg |
|
Windows XP, Vista, and Windows 7 compatible
|
| |
For more information click here AS-D100 |
|
| |
|
| |
|
| |
|
| |
P-6 Stylus Profiler
The P-6 stylus profiler offers a combination of advanced features for process development and manufacturing control of scientific research, photovoltaic solar manufacturing, data storage, MEMS, opto-electronics, and other industrial metrology applications. The P-6 system utilizes numerous platform and measurement technologies from KLA-Tencor's most advanced semiconductor profiler systems for surface topography analysis - programmable scan stage, low noise, and high quality, high resolution long scans -- but in a smaller, more economical design for substrates up to 150mm.
For more details click here P-6
|
 |
|
| |
|
| |
|
P-16+ Compact, Advanced Surface Profiling
The P-16+ stylus profiler is a surface metrology tool used in a wide range of applications and industries, from R&D departments and universities to production and process monitoring. Its precise force control provides excellent vertical resolution, precision, and reliability measurements. It delivers automated step height, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials.
For more details click here P-16
|
|
| |
|
| |
|
|
MicroXAM - 100
The MicroXAM-100 3D surface profiler complements KLA-Tencor surface profiling portfolio by combining white light and phase-shifting interferometry for precise, non-destructive surface measurements that are internally and permanently referenced to a standard wavelength of light. The surface profiler system provides precise, high-resolution, non-contact 3D profiles of both smooth and rough surfaces. The intuitive Windows user interface allows simple and reproducible program navigation.
|
|
250 μm closed loop vertical range |
|
PSI (phase) and VSI mode (vertical) |
|
100mm x 100mm manual sample positioning stage (optional 100mm x 100mm motorized stage) |
|
Solid State light source |
|
Optional stitching and auto alignment of images |
|
Windows XP and Vista compatible
|
| |
|
|
| |
|
